| GENERAL SPECIFICATION |
| Dimensions - (W x D x H) |
| Decapsulator |
7.5 x 12.5 x 12 inch (190 x 318 x 305 mm) |
| Bottle Assembly |
10 x 5 x 11 inch (254 x127 x 279 mm) |
| Weight |
approx. 35 lbs.(16 Kg) |
| Power Source |
90~250 VAC |
| Acid temp. range |
20~250℃ |
| Acid temp. set point |
1.0℃ ± 0.1℃ |
| Etch cavity (up to) |
22 x 22 mm |
| SOFTWARE OPERATIONAL SPECIFICATION |
| Choice of acid selection |
fuming sulfuric acid |
| fuming nitric acids |
| mixed acids |
| NOTE: All mix ratios are dynamically prepared within pumping assembly |
| Acid mix ratios |
(nitric to sulfuric ratios)
9:1, 5:1, 4:1, 3:1, 2:1, 1:1 |
| Post etch rinse options |
fuming sulfuric acid |
| fuming nitiric acid |
| mixed acids |
| no rinse |
NOTE: Acid rinse temperature setttings are automatically calibrated
to optimum etch temperatures. |
| Etch times |
1 to 1,800 seconds (1 sec. increments) |
| Dynamic (real time) adjustment of etch time |
| Etch modalities |
Pulse Etch, Reciprocal Etch Acid Pulse (REAP) |
| NOTE: REAP is a superior approach to maximizing the carrying capacity for the etch acid(s) within the package volume. It allows superior etch characteristics when nitric acid or mixed acids are selected. |
| Etch temperature ranges |
20 to 90℃ (nitric acid) |
| 20 to 250℃ (sulfuric acid) |
| 20 to 100℃ (mixed acids) |
| Etchant acid volume selection |
1 to 6 ml. per minute for all acids and acid mixes |
| Operator program storage |
100 programs stored to nonvolatile memory |
| Software upgrades |
via RS 232 computer link |
| SAFETY DESIGN FEATURES |
| EMO Emergency Power Off switch |
| Etch head safety |
over temperature sensor circuitry |
| Leak detection sensors |
in Decapsulator Body |
| in Bottle Box Assembly |
| Secondary containment |
True Secondary Containment |
| Acid fume reduction |
Waste acid heat exchanger to minimize acid fuming |
| CERTIFICATIONS & INDUSTRY COMPLIANCE |
| RoHS, CE Certification, SEMI S-2
93,SEMI S-2 2000 |
| WARRANTIES |
| All parts are warranted for a period of twelve(12) months to be free of defects in material and workmanship when used under normal operating conditions and when recommended preventative maintenance is properly performed. |