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APPLICATIONS
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Ideal for pilot lines, R&D, and Industrial quality
processes ,the Profilers provides all the tools necessary to analyze a variety of surfaces and applications:
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| Film Thickness/Etch |
Performs film thickness and metal etch uniformity on open geometries with automated analysis |
| SIMS Crater |
crater depth and area |
| MEMS |
characterize stiction and analyze area |
| Optoelectronics |
microlens height, curvature, and area |
| Ceramics |
roughness on ceramic substrates and hybrid circuit components |
| Industrial Machining |
roughness of machined polish surfaces |
| Data Storage |
R&D analysis such as disk defects, duboff,and surface characterization of mechanical components used on hard drives |
Main Function Highlight
| Step Height Metrology: |
- Automatic Step feature detection: calculate step numbers, and mean std deviation. |
| - Measure height and Co-planarity of bumps for flip chip technology. |
| - High repeatability, ultra-low-noise electronics mechanism. |
| - Dual scan modes: Single and multi-scan average (10 times). |
| - Automatic leveling algorithms. |
| Easy-to-use interface: |
- Windows OS, contain two screens: Scan windows & Data Review windows.
.Combine live Video with recipe, and analysis results.
.Customizable & automatic report generator for the data. |
| - An interactive help menu: offer definitions, examples, etc. |
| - Easy programmable recipes. |
| Powerful data process: |
- User-selectable filters for each scan data: roughness, waviness analysis. |
| - Up to 48 parameters can be analyzed. |
| - 15 types of data studies: eg. Histogram, PSD plots, defect removal. |
| - Specific result data instruction: inform within or outside the tolerances. |
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